Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241845 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Prashant Gadgil, Janet M. Flanner, John P. Jordan, Robert Chebi | 2001-06-05 |
| 6048798 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Prashant Gadgil, Janet M. Flanner, John P. Jordon, Robert Chebi | 2000-04-11 |
| 5783496 | Methods and apparatus for etching self-aligned contacts | Janet M. Flanner, Prashant Gadgil, Linda Marquez, Joel M. Cook | 1998-07-21 |