Issued Patents All Time
Showing 26–50 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8273259 | Ashing method | Huatan Qiu | 2012-09-25 |
| 8193096 | High dose implantation strip (HDIS) in H2 base chemistry | Haruhiro Harry Goto | 2012-06-05 |
| 8129281 | Plasma based photoresist removal system for cleaning post ash residue | Kirk Ostrowski | 2012-03-06 |
| 8110068 | Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes | Huatan Qiu, Woody Chung, Anirban Guha | 2012-02-07 |
| 7936666 | Virtual router with a priority value per port | Xiaohong Pan | 2011-05-03 |
| 7740768 | Simultaneous front side ash and backside clean | Haruhiro Harry Goto | 2010-06-22 |
| 7651725 | Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2010-01-26 |
| 7560377 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2009-07-14 |
| 7227244 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Melissa Yu, Hongquing Shan, Wai-Fan Yau, Kuowei Liu +7 more | 2007-06-05 |
| 7205249 | CVD plasma assisted low dielectric constant films | Wai-Fan Yau, Robert R. Mandal | 2007-04-17 |
| 7202176 | Enhanced stripping of low-k films using downstream gas mixing | Haruhiro Harry Goto, Prabhat Kumar Sinha | 2007-04-10 |
| 7160821 | Method of depositing low k films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2007-01-09 |
| 7070657 | Method and apparatus for depositing antireflective coating | Joe Feng, Judy H. Huang, Wai-Fan Yau | 2006-07-04 |
| 7023092 | Low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2006-04-04 |
| 6930061 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-08-16 |
| 6869896 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-03-22 |
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, Wai-Fan Yau, Kuowei Liu +7 more | 2005-02-22 |
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2004-10-19 |
| 6800571 | CVD plasma assisted low dielectric constant films | Wai-Fan Yau, Robert R. Mandal | 2004-10-05 |
| 6770556 | Method of depositing a low dielectric with organo silane | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2004-08-03 |
| 6743737 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal, Farhad Moghadam | 2004-06-01 |
| 6734115 | Plasma processes for depositing low dielectric constant films | Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2004-05-11 |
| 6730593 | Method of depositing a low K dielectric with organo silane | Wai-Fan Yau, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2004-05-04 |
| 6709715 | Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds | Chi-I Lang, Shin-Puu Jeng, Yeming Jim Ma, Fong Chang, Peter Wai-Man Lee | 2004-03-23 |
| 6689930 | Method and apparatus for cleaning an exhaust line in a semiconductor processing system | Ben Pang, William Taylor, Sebastion Raoux, Mark Fodor | 2004-02-10 |