Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7202176 | Enhanced stripping of low-k films using downstream gas mixing | Haruhiro Harry Goto, David Cheung | 2007-04-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7202176 | Enhanced stripping of low-k films using downstream gas mixing | Haruhiro Harry Goto, David Cheung | 2007-04-10 |