Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9397011 | Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper | Haoquan Fang, David Cheung | 2016-07-19 |
| 6325948 | Waferless clean process of a dry etcher | Ta-Chin Chen, Wen-Ruey Chang, Hsew-Chu Hsu, Ming-Je Huang, Sheung Kan Tsang | 2001-12-04 |