TC

Ta-Chin Chen

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,601,600 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6325948 Waferless clean process of a dry etcher Wen-Ruey Chang, Hsew-Chu Hsu, Ming-Je Huang, Sheung Kan Tsang, Yuk-Hong Ting 2001-12-04