Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6325948 | Waferless clean process of a dry etcher | Ta-Chin Chen, Wen-Ruey Chang, Hsew-Chu Hsu, Ming-Je Huang, Yuk-Hong Ting | 2001-12-04 |
ST
Sheung Kan Tsang
Overall (All Time): #3,601,598 of 4,157,543Top 90%
1
Patents All Time