Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7789993 | Internal balanced coil for inductively coupled high density plasma processing chamber | Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua, Siqing Lu +4 more | 2010-09-07 | $5,434,000 |
| 7651587 | Two-piece dome with separate RF coils for inductively coupled plasma reactors | Siqing Lu, Qiwei Liang, Canfeng Lai, Jason Bloking, Irene Chou +3 more | 2010-01-26 | $9,867,000 |
| 7629271 | High stress diamond like carbon film | Jing-Lung Wu, Anchuan Wang, Young S. Lee | 2009-12-08 | $20,724,000 |
| 7572647 | Internal balanced coil for inductively coupled high density plasma processing chamber | Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua, Siqing Lu +4 more | 2009-08-11 | $21,048,000 |