Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7811411 | Thermal management of inductively coupled plasma reactors | Siqing Lu, Qiwei Liang, Steven H. Kim, Young S. Lee, Ellie Yieh +1 more | 2010-10-12 |
| 7651587 | Two-piece dome with separate RF coils for inductively coupled plasma reactors | Siqing Lu, Qiwei Liang, Canfeng Lai, Robert Chen, Jason Bloking +3 more | 2010-01-26 |