Issued Patents All Time
Showing 51–75 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049921 | Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor | Nerissa Draeger, Kaihan Ashtiani, Derek Wong, Bart J. van Schravendijk, George Andrew Antonelli +3 more | 2018-08-14 |
| 10014174 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Pramit Manna, Li Yan Miao, Bok Hoen Kim, Christopher Dennis Bencher | 2018-07-03 |
| 9984976 | Interconnect structures and methods of formation | Yana Cheng, Yong Cao, Srinivas Guggilla, Sree Rangasai V. Kesapragada, Xianmin Tang | 2018-05-29 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2018-05-08 |
| 9793108 | Interconnect integration for sidewall pore seal and via cleanliness | He Ren, Mehul Naik, Priyanka DASH, Bhaskar Kumar, Alexandros T. Demos | 2017-10-17 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2017-08-01 |
| 9659771 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Pramit Manna, Li Yan Miao, Bok Hoen Kim, Christopher Dennis Bencher | 2017-05-23 |
| 9646876 | Aluminum nitride barrier layer | Srinivas Guggilla, Alexandros T. Demos, Bhaskar Kumar, He Ren, Priyanka DASH | 2017-05-09 |
| 9613908 | Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications | Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Alexandros T. Demos, Mukund Srinivasan | 2017-04-04 |
| 9580801 | Enhancing electrical property and UV compatibility of ultrathin blok barrier film | Xiaolan Ba, Weifeng YE, Mei-Yee Shek, Yu Jin, Li-Qun Xia +1 more | 2017-02-28 |
| 9570303 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Sung Hyun Hong, Bok Hoen Kim, Derek R. Witty | 2017-02-14 |
| 9502263 | UV assisted CVD AlN film for BEOL etch stop application | Alexandros T. Demos | 2016-11-22 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Wei Tang, Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie +1 more | 2016-08-23 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Li Yan Miao, Pramit Manna, Christopher Dennis Bencher +4 more | 2016-05-10 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |
| 8993454 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Martin Jay Seamons, Sudha Rathi, Kwangduk Douglas Lee, Bok Hoen Kim, Chiu Chan | 2015-03-31 |
| 8778813 | Confined process volume PECVD chamber | Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Dale R. Du Bois, Mark Fodor +6 more | 2014-07-15 |
| 8679987 | Deposition of an amorphous carbon layer with high film density and high etch selectivity | Patrick Reilly, Shahid Shaikh, Tersem Summan, Sanjeev Baluja, Juan Carlos Rocha-Alvarez +3 more | 2014-03-25 |
| 8569105 | Passivating glue layer to improve amorphous carbon to metal adhesion | Siu F. Cheng | 2013-10-29 |
| 8536065 | Ultra high selectivity doped amorphous carbon strippable hardmask development and integration | Martin Jay Seamons, Sudha Rathi, Kwangduk Douglas Lee, Bok Hoen Kim, Chiu Chan | 2013-09-17 |
| 8349741 | Amorphous carbon deposition method for improved stack defectivity | Hang Yu, Man-Ping Cai, Naomi Yoshida, Li Yan Miao, Siu F. Cheng +4 more | 2013-01-08 |
| 8282734 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou, Karthik Janakiraman +4 more | 2012-10-09 |
| 8278139 | Passivating glue layer to improve amorphous carbon to metal adhesion | Siu F. Cheng | 2012-10-02 |
| 8252699 | Composite removable hardmask | Anthony Konecni, Josephine Juhwei Liu, Bok Hoen Kim, William H. McClintock | 2012-08-28 |
| 8227352 | Amorphous carbon deposition method for improved stack defectivity | Hang Yu, Man-Ping Cai, Naomi Yoshida, Li Yan Miao, Siu F. Cheng +4 more | 2012-07-24 |