Issued Patents All Time
Showing 76–93 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8105465 | Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD) | Kwangduk Douglas Lee, Takashi Morii, Yoichi Suzuki, Sudha Rathi, Martin Jay Seamons +2 more | 2012-01-31 |
| 8097082 | Nonplanar faceplate for a plasma processing chamber | Jianhua Zhou, Karthik Janakiraman, Hang Yu, Siu F. Cheng, Yoganand Saripalli +1 more | 2012-01-17 |
| 7867578 | Method for depositing an amorphous carbon film with improved density and step coverage | Hyoung-Chan Ha, Sudha Rathi, Derek R. Witty, Chiu Chan, Sohyun Park +6 more | 2011-01-11 |
| 7802538 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Sohyun Park, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Li-Qun Xia, Derek R. Witty +1 more | 2010-09-28 |
| 7572337 | Blocker plate bypass to distribute gases in a chemical vapor deposition system | Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Tom K. Cho, Thomas Nowak, Bok Hoen Kim +2 more | 2009-08-11 |
| 7514125 | Methods to improve the in-film defectivity of PECVD amorphous carbon films | Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou, Karthik Janakiraman +4 more | 2009-04-07 |
| 7407893 | Liquid precursors for the CVD deposition of amorphous carbon films | Martin Jay Seamons, Wendy H. Yeh, Sudha Rathi, Andy Luan, Sum-Yee Betty Tang +6 more | 2008-08-05 |
| 7259111 | Interface engineering to improve adhesion between low k stacks | Ganesh Balasubramanian, Annamalai Lakshmanan, Zhenjiang Cui, Juan Carlos Rocha-Alvarez, Bok Hoen Kim +3 more | 2007-08-21 |
| 7205228 | Selective metal encapsulation schemes | Srinivas Gandikota, Mehul Naik, Suketu Arun Parikh, Girish Dixit | 2007-04-17 |
| 7189658 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Annamalai Lakshmanan, Ganesh Balasubramanian, Zhenjiang Cui, Daemian Raj, Juan Carlos Rocha-Alvarez +2 more | 2007-03-13 |
| 7166544 | Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors | Sohyun Park, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Li-Qun Xia, Derek R. Witty +1 more | 2007-01-23 |
| 6951599 | Electropolishing of metallic interconnects | Joseph Yahalom, Srinivas Gandikota, Girish Dixit | 2005-10-04 |
| 6905622 | Electroless deposition method | Joseph Yahalom, Sivakami Ramanathan, Chris McGuirk, Srinivas Gandikota, Girish Dixit | 2005-06-14 |
| 6899816 | Electroless deposition method | Joseph Yahalom, Sivakami Ramanathan, Chris McGuirk, Srinivas Gandikota, Girish Dixit | 2005-05-31 |
| 6878245 | Method and apparatus for reducing organic depletion during non-processing time periods | Srinivas Gandikota, Chris McGuirk, Sivakami Ramanathan, Muhammad Malik, Girish Dixit | 2005-04-12 |
| 6824666 | Electroless deposition method over sub-micron apertures | Srinivas Gandikota, Chris McGuirk, Muhammad Malik, Sivakami Ramanathan, Girish Dixit +1 more | 2004-11-30 |
| 6821909 | Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application | Sivakami Ramanathan, Srinivas Gandikota, Girish Dixit | 2004-11-23 |
| 6723224 | Electro-chemical polishing apparatus | Joseph Yahalom, Srinivas Gandikota, Christopher McGuirk | 2004-04-20 |