Issued Patents All Time
Showing 26–50 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339475 | Film stack overlay improvement | Xinhai Han, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang, Masaki Ogata +8 more | 2022-05-24 |
| 11289369 | Low-k dielectric with self-forming barrier layer | Yi Ding, Shaunak Mukherjee, Bo Xie, Kang Sub Yim | 2022-03-29 |
| 11276569 | On stack overlay improvement for 3D NAND | Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Yusheng Zhou, Xinhai Han +3 more | 2022-03-15 |
| 11270903 | Multi zone electrostatic chuck | Madhu Santosh Kumar Mutyala, Sanjay Kamath | 2022-03-08 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |
| 11157661 | Process development visualization tool | Vinayak Veer Vats, Sidharth Bhatia, Garrett H. Sin, Pramod Nambiar, Hang Yu +2 more | 2021-10-26 |
| 11145504 | Method of forming film stacks with reduced defects | Zhijun Jiang, Ganesh Balasubramanian, Arkajit Roy Barman, Hidehiro Kojiri, Xinhai Han +8 more | 2021-10-12 |
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2021-10-05 |
| 11060189 | Method to enable high temperature processing without chamber drifting | Michael Wenyoung Tsiang, Praket P. Jha | 2021-07-13 |
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Ziqing Duan, Abhijit Basu Mallick | 2021-05-18 |
| 10950430 | Pulsed plasma deposition etch step coverage improvement | Vinayak Veer Vats, Hang Yu, Changling Li, Gregory M. Amico, Sanjay Kamath | 2021-03-16 |
| 10790140 | High deposition rate and high quality nitride | Xinhai Han, Masaki Ogata, Yinan Zhang, Shaunak Mukherjee | 2020-09-29 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2020-07-07 |
| 10700087 | Multi-layer stacks for 3D NAND extendibility | Xinhai Han, Er-Xuan Ping, Srinivas Guggilla | 2020-06-30 |
| 10612135 | Method and system for high temperature clean | Sanjeev Baluja, Kalyanjit Ghosh, Ren-Guan Duan, Mayur Govind Kulkarni, Gregory Siu +4 more | 2020-04-07 |
| 10595477 | Oxide with higher utilization and lower cost | Lei Guo, Praket P. Jha, Milind Gadre, Tza-Jing Gung | 2020-03-24 |
| 10593543 | Method of depositing doped amorphous silicon films with enhanced defect control, reduced substrate sensitivity to in-film defects and bubble-free film growth | Milind Gadre, Praket P. Jha | 2020-03-17 |
| 10553427 | Low dielectric constant oxide and low resistance OP stack for 3D NAND application | Xinhai Han, Kang Sub Yim, Zhijun Jiang | 2020-02-04 |
| 10515796 | Dry etch rate reduction of silicon nitride films | Michael Wenyoung Tsiang, Hang Yu, Tza-Jing Gung | 2019-12-24 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Ziqing Duan, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick | 2019-09-10 |
| 10236182 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Sung Hyun Hong, Bok Hoen Kim, Derek R. Witty | 2019-03-19 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2019-03-12 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2018-10-23 |
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2018-09-11 |
| 10074559 | Selective poreseal deposition prevention and residue removal using SAM | Geetika Bajaj, Tapash Chakraborty, Prerna Goradia, Robert Jan Visser, Bhaskar Kumar | 2018-09-11 |