Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990332 | Methods and apparatus for deposition of low-k films | Bhaskar Jyoti Bhuyan, Mark Saly, Ning Li, Mihaela Balseanu, Li-Qun Xia +2 more | 2024-05-21 |
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Mihaela Balseanu, Li-Qun Xia, Bhaskar Jyoti Bhuyan, Mark Saly | 2021-03-23 |
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Mihaela Balseanu, Li-Qun Xia, Bhaskar Jyoti Bhuyan, Mark Saly | 2019-10-22 |