Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735467 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Nitin K. Ingle, Ajay Bhatnagar +1 more | 2023-08-22 |
| 11417534 | Selective material removal | Ming Xia, Dongqing Yang | 2022-08-16 |
| 11211286 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Nitin K. Ingle, Ajay Bhatnagar +1 more | 2021-12-28 |
| 9991134 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2018-06-05 |
| 9881805 | Silicon selective removal | Zihui Li, Hanshen Zhang, Jingchun Zhang | 2018-01-30 |
| 9704723 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-07-11 |
| 9659792 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-05-23 |
| 9502258 | Anisotropic gap etch | Jun Xue, Zihui Li, Ludovic Godet, Anchuan Wang, Nitin K. Ingle | 2016-11-22 |
| 9449845 | Selective titanium nitride etching | Jie Liu, Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Seung Ho Park +1 more | 2016-09-20 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9437451 | Radical-component oxide etch | Zhijun Chen, Jingchun Zhang, Seung Ho Park, Anchuan Wang, Nitin K. Ingle | 2016-09-06 |
| 9412608 | Dry-etch for selective tungsten removal | Xikun Wang, Nitin K. Ingle, Zihui Li, Anchuan Wang | 2016-08-09 |
| 9378969 | Low temperature gas-phase carbon removal | Nitin K. Ingle, Hiroshi Hamana, Anchuan Wang | 2016-06-28 |
| 9184055 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-11-10 |
| 9153442 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-10-06 |
| 9093371 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-07-28 |
| 9064816 | Dry-etch for selective oxidation removal | Sang Hyuk Kim, Dongqing Yang, Young S. Lee, Weon Young Jung, Sang Jin Kim +2 more | 2015-06-23 |
| 9023732 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-05-05 |
| 9023734 | Radical-component oxide etch | Zhijun Chen, Jingchun Zhang, Seung Ho Park, Anchuan Wang, Nitin K. Ingle | 2015-05-05 |
| 8980763 | Dry-etch for selective tungsten removal | Xikun Wang, Nitin K. Ingle, Zihui Li, Anchuan Wang | 2015-03-17 |
| 8921234 | Selective titanium nitride etching | Jie Liu, Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Seung Ho Park +1 more | 2014-12-30 |
| 8896077 | Optoelectronic semiconductor device and method of fabrication | Yi Cui, Jia Zhu, Shanhui Fan, Zongfu Yu | 2014-11-25 |
| 8394550 | Nano-patterned electrolytes in solid oxide fuel cells | Cheng-Chieh Chao, Yi Cui, Young Beom Kim, Friedrich B. Prinz | 2013-03-12 |
| 8318604 | Substrate comprising a nanometer-scale projection array | Yi Cui, Jia Zhu, Stephen T. Connor, Zongfu Yu, Shanhui Fan +1 more | 2012-11-27 |
| D435081 | Gas spray gun | — | 2000-12-12 |