Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272563 | Metal oxide directional removal | Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang | 2025-04-08 |
| 12087595 | Metal deposition and etch in high aspect-ratio features | Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang | 2024-09-10 |
| 11984325 | Selective removal of transition metal nitride materials | Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui, Anchuan Wang | 2024-05-14 |
| 11798813 | Selective removal of ruthenium-containing materials | Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui, Anchuan Wang | 2023-10-24 |
| 11728177 | Systems and methods for nitride-containing film removal | Oliver Jan, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang | 2023-08-15 |
| 11631589 | Metal etch in high aspect-ratio features | Xiaolin Chen, Rohan Puligoru Reddy, Oliver Jan, Zhenjiang Cui, Anchuan Wang | 2023-04-18 |