Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984325 | Selective removal of transition metal nitride materials | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Zhenjiang Cui, Anchuan Wang | 2024-05-14 |
| 11798813 | Selective removal of ruthenium-containing materials | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Zhenjiang Cui, Anchuan Wang | 2023-10-24 |
| 11728177 | Systems and methods for nitride-containing film removal | Baiwei Wang, Rohan Puligoru Reddy, Xiaolin Chen, Zhenjiang Cui, Anchuan Wang | 2023-08-15 |
| 11631589 | Metal etch in high aspect-ratio features | Baiwei Wang, Xiaolin Chen, Rohan Puligoru Reddy, Zhenjiang Cui, Anchuan Wang | 2023-04-18 |
| 11264249 | Carbon containing hardmask removal process using sulfur containing process gas | Fen Dai, Tinghao Wang, Moo-Hyun Kim, Shawming Ma, Zhongming Liu | 2022-03-01 |