Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carbon containing hardmask removal process using sulfur containing process gas

Carbon containing hardmask removal process using sulfur containing process gas

US Patent 11264249 · Granted Mar 1, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor structure and method for manufacturing same2025
Memory device, and semiconductor structure and forming method thereof2025
Method for manufacturing semiconductor structure, and semiconductor structure2025
Method of manufacturing semiconductor structure and semiconductor structure2025
Enhanced ignition in inductively coupled plasmas for workpiece processing2025
Semiconductor structure and method for fabricating same2025
Preparation method for semiconductor structure and same2025
Apparatus and method for a real-time-monitoring of a riser and mooring of floati2025
Manufacturing method of semiconductor structure with epitaxial layer forming ext2025
Semiconductor structure and manufacturing method thereof2025
Memory device capacitor contact structure and method for preparing same2024
Method for manufacturing semiconductor structure and semiconductor structure2024