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Metal oxide directional removal |
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Metal deposition and etch in high aspect-ratio features |
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Selective removal of transition metal nitride materials |
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| 11798813 |
Selective removal of ruthenium-containing materials |
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2023-10-24 |
| 11728177 |
Systems and methods for nitride-containing film removal |
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| 11631589 |
Metal etch in high aspect-ratio features |
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| 11488835 |
Systems and methods for tungsten-containing film removal |
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2022-11-01 |
| 11062921 |
Systems and methods for aluminum-containing film removal |
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2021-07-13 |
