Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7601652 | Method for treating substrates and films with photoexcitation | Kaushal K. Singh, Jacob Smith, R. Suryanarayanan Iyer, Steve Ghanayem, Adam Brailove +2 more | 2009-10-13 |
| 7488690 | Silicon nitride film with stress control | R. Suryanarayanan Iyer, Andrew Lam, Yuji Maeda, Thomas C. Mele, Jacob Smith +3 more | 2009-02-10 |
| 7473655 | Method for silicon based dielectric chemical vapor deposition | Yaxin Wang, Yuji Maeda, Thomas C. Mele, Sanjeev Tandon, R. Suryanarayanan Iyer | 2009-01-06 |
| 7365029 | Method for silicon nitride chemical vapor deposition | R. Suryanarayanan Iyer, Sanjeev Tandon, Errol Antonio C. Sanchez, Shulin Wang | 2008-04-29 |
| 7094680 | Formation of a tantalum-nitride layer | Michael Yang, Ming Xi | 2006-08-22 |
| 6951804 | Formation of a tantalum-nitride layer | Michael Yang, Ming Xi | 2005-10-04 |