Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Alexander Tam | 2018-08-28 |
| 9267739 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Alexander Tam | 2016-02-23 |