Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431435 | Wafer carrier with independent isolated heater zones | Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen | 2019-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431435 | Wafer carrier with independent isolated heater zones | Dmitry Lubomirsky, Son T. Nguyen, Anh N. Nguyen | 2019-10-01 |