Reducing substrate surface scratching using machine learning

Assignee

• Applied Materials

Inventors

• Kartik Shah (68 patents)
• Satish Radhakrishnan (17 patents)
• Karthik Ramanathan (21 patents)
• Karthikeyan Balaraman (7 patents)
• Adolph Miller Allen (42 patents)
• Xinyuan Chong (7 patents)
• Mitrabhanu Sahu (2 patents)
• Wenjing Xu (14 patents)
• Michael S. Jackson (20 patents)
• Weize Hu (12 patents)
• Feng Chen (17 patents)

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