Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12281381 | Methods and apparatus for processing a substrate | Sireesh Adimadhyam | 2025-04-22 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2024-09-17 |
| 12018361 | Waveform shape factor for pulsed PVD power | Keith A. Miller | 2024-06-25 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 10157733 | Methods for igniting a plasma in a substrate processing chamber | Fuhong Zhang, Joung Joo Lee | 2018-12-18 |
| 9818584 | Internal split faraday shield for a plasma source | Thomas G. Miller | 2017-11-14 |
| 9691583 | Imaging and processing for plasma ion source | Thomas G. Miller, Sean Kellogg, Mostafa Maazouz, Anthony Graupera | 2017-06-27 |
| 9530625 | Method for attachment of an electrode into an inductively-coupled plasma | Sean Kellogg, Anthony Graupera, William Parker, Andrew B. Wells, Mark W. Utlaut +3 more | 2016-12-27 |
| 9196451 | Plasma source for charged particle beam system | Noel Smith, Walter Skoczylas | 2015-11-24 |
| 9105438 | Imaging and processing for plasma ion source | Tom Miller, Sean Kellogg, Mostafa Maazouz, Anthony Graupera | 2015-08-11 |
| 9053895 | System for attachment of an electrode into a plasma source | Sean Kellogg, Anthony Graupera, N. William Parker, Andrew B. Wells, Mark W. Utlaut +3 more | 2015-06-09 |
| 8736177 | Compact RF antenna for an inductively coupled plasma ion source | — | 2014-05-27 |
| 8723143 | Plasma igniter for an inductively coupled plasma ion source | Anthony Graupera, Sean Kellogg, Tom Miller, Dustin Laur, Antonius Bastianus Wilhelmus Dirriwachter | 2014-05-13 |
| 8445870 | Charged particle beam system having multiple user-selectable operating modes | Tom Miller, Sean Kellog, Anthony Graupera | 2013-05-21 |
| 8253118 | Charged particle beam system having multiple user-selectable operating modes | Tom Miller, Sean Kellogg, Anthony Graupera | 2012-08-28 |
| 8124942 | Plasma igniter for an inductively coupled plasma ion source | Anthony Graupera, Sean Kellogg, Tom Miller, Dustin Laur, Antonius Bastianus Wilhelmus Dirriwachter | 2012-02-28 |