Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530625 | Method for attachment of an electrode into an inductively-coupled plasma | Sean Kellogg, Anthony Graupera, William Parker, Andrew B. Wells, Mark W. Utlaut +3 more | 2016-12-27 |
| 9196451 | Plasma source for charged particle beam system | Shouyin Zhang, Noel Smith | 2015-11-24 |
| 9053895 | System for attachment of an electrode into a plasma source | Sean Kellogg, Anthony Graupera, N. William Parker, Andrew B. Wells, Mark W. Utlaut +3 more | 2015-06-09 |
| 6797953 | Electron beam system using multiple electron beams | Robert L. Gerlach, Paul P. Tesch | 2004-09-28 |
| 6710338 | Focused ion beam system | Robert L. Gerlach, Paul P. Tesch, Noel P. Martin, Drew Procyk | 2004-03-23 |