| 10192708 |
Electron emitter source |
Gerald G. Magera |
2019-01-29 |
| 10128076 |
Inductively coupled plasma ion source with tunable radio frequency power |
Roderick Boswell, Noel Smith, Noel P. Martin, Philip J. Witham |
2018-11-13 |
| 9655223 |
RF system, magnetic filter, and high voltage isolation for an inductively coupled plasma ion source |
Noel Smith, Roderick Boswell, Noel P. Martin |
2017-05-16 |
| 9401262 |
Multi-source plasma focused ion beam system |
Noel Smith, Clive D. Chandler, Mark W. Utlaut, David William Tuggle |
2016-07-26 |
| 9029812 |
Multi-source plasma focused ion beam system |
Noel Smith, Clive D. Chandler, Mark W. Utlaut, David William Tuggle |
2015-05-12 |
| 8692217 |
Multi-source plasma focused ion beam system |
Noel Smith, Clive D. Chandler, Mark W. Utlaut, Dave Tuggle |
2014-04-08 |
| 8525419 |
High voltage isolation and cooling for an inductively coupled plasma ion source |
Noel Smith, Noel P. Martin |
2013-09-03 |
| 8405054 |
Multi-source plasma focused ion beam system |
Noel Smith, Clive D. Chandler, Mark W. Utlaut, Dave Tuggle |
2013-03-26 |
| 8076650 |
Multi-source plasma focused ion beam system |
Noel Smith, Clive D. Chandler, Mark W. Utlaut, Dave Tuggle |
2011-12-13 |
| 6949756 |
Shaped and low density focused ion beams |
Robert L. Gerlach, Mark W. Utlaut, Richard Young, Clive D. Chandler, Karl D. van der Mast |
2005-09-27 |
| 6797953 |
Electron beam system using multiple electron beams |
Robert L. Gerlach, Walter Skoczylas |
2004-09-28 |
| 6797969 |
Multi-column FIB for nanofabrication applications |
Robert L. Gerlach, Lynwood W. Swanson, Mark W. Utlaut |
2004-09-28 |
| 6710338 |
Focused ion beam system |
Robert L. Gerlach, Noel P. Martin, Walter Skoczylas, Drew Procyk |
2004-03-23 |