| 9691583 |
Imaging and processing for plasma ion source |
Thomas G. Miller, Sean Kellogg, Shouyin Zhang, Mostafa Maazouz |
2017-06-27 |
| 9627169 |
Plasma ion source for use with a focused ion beam column with selectable ions |
Charles Otis |
2017-04-18 |
| 9530625 |
Method for attachment of an electrode into an inductively-coupled plasma |
Sean Kellogg, William Parker, Andrew B. Wells, Mark W. Utlaut, Walter Skoczylas +3 more |
2016-12-27 |
| 9159534 |
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source |
Sean Kellogg, Mark W. Utlaut, N. William Parker |
2015-10-13 |
| 9105438 |
Imaging and processing for plasma ion source |
Tom Miller, Sean Kellogg, Shouyin Zhang, Mostafa Maazouz |
2015-08-11 |
| 9087671 |
Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions |
Charles Otis |
2015-07-21 |
| 9053895 |
System for attachment of an electrode into a plasma source |
Sean Kellogg, N. William Parker, Andrew B. Wells, Mark W. Utlaut, Walter Skoczylas +3 more |
2015-06-09 |
| 8987678 |
Encapsulation of electrodes in solid media |
Sean Kellogg, N. William Parker, Mark W. Utlaut |
2015-03-24 |
| 8822913 |
Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions |
Charles Otis |
2014-09-02 |
| 8759764 |
On-axis detector for charged particle beam system |
N. William Parker, Mark W. Utlaut |
2014-06-24 |
| 8723143 |
Plasma igniter for an inductively coupled plasma ion source |
Sean Kellogg, Tom Miller, Dustin Laur, Shouyin Zhang, Antonius Bastianus Wilhelmus Dirriwachter |
2014-05-13 |
| 8642974 |
Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation |
Sean Kellogg, Andrew B. Wells, James B. McGinn, N. William Parker, Mark W. Utlaut |
2014-02-04 |
| 8633452 |
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source |
Sean Kellogg, Mark W. Utlaut, N. William Parker |
2014-01-21 |
| 8445870 |
Charged particle beam system having multiple user-selectable operating modes |
Shouyin Zhang, Tom Miller, Sean Kellog |
2013-05-21 |
| 8278220 |
Method to direct pattern metals on a substrate |
Theresa Holtermann, Michael DiBattista |
2012-10-02 |
| 8253118 |
Charged particle beam system having multiple user-selectable operating modes |
Shouyin Zhang, Tom Miller, Sean Kellogg |
2012-08-28 |
| 8124942 |
Plasma igniter for an inductively coupled plasma ion source |
Sean Kellogg, Tom Miller, Dustin Laur, Shouyin Zhang, Antonius Bastianus Wilhelmus Dirriwachter |
2012-02-28 |