Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691583 | Imaging and processing for plasma ion source | Thomas G. Miller, Sean Kellogg, Shouyin Zhang, Mostafa Maazouz | 2017-06-27 |
| 9627169 | Plasma ion source for use with a focused ion beam column with selectable ions | Charles Otis | 2017-04-18 |
| 9530625 | Method for attachment of an electrode into an inductively-coupled plasma | Sean Kellogg, William Parker, Andrew B. Wells, Mark W. Utlaut, Walter Skoczylas +3 more | 2016-12-27 |
| 9159534 | Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source | Sean Kellogg, Mark W. Utlaut, N. William Parker | 2015-10-13 |
| 9105438 | Imaging and processing for plasma ion source | Tom Miller, Sean Kellogg, Shouyin Zhang, Mostafa Maazouz | 2015-08-11 |
| 9087671 | Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions | Charles Otis | 2015-07-21 |
| 9053895 | System for attachment of an electrode into a plasma source | Sean Kellogg, N. William Parker, Andrew B. Wells, Mark W. Utlaut, Walter Skoczylas +3 more | 2015-06-09 |
| 8987678 | Encapsulation of electrodes in solid media | Sean Kellogg, N. William Parker, Mark W. Utlaut | 2015-03-24 |
| 8822913 | Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions | Charles Otis | 2014-09-02 |
| 8759764 | On-axis detector for charged particle beam system | N. William Parker, Mark W. Utlaut | 2014-06-24 |
| 8723143 | Plasma igniter for an inductively coupled plasma ion source | Sean Kellogg, Tom Miller, Dustin Laur, Shouyin Zhang, Antonius Bastianus Wilhelmus Dirriwachter | 2014-05-13 |
| 8642974 | Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation | Sean Kellogg, Andrew B. Wells, James B. McGinn, N. William Parker, Mark W. Utlaut | 2014-02-04 |
| 8633452 | Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source | Sean Kellogg, Mark W. Utlaut, N. William Parker | 2014-01-21 |
| 8445870 | Charged particle beam system having multiple user-selectable operating modes | Shouyin Zhang, Tom Miller, Sean Kellog | 2013-05-21 |
| 8278220 | Method to direct pattern metals on a substrate | Theresa Holtermann, Michael DiBattista | 2012-10-02 |
| 8253118 | Charged particle beam system having multiple user-selectable operating modes | Shouyin Zhang, Tom Miller, Sean Kellogg | 2012-08-28 |
| 8124942 | Plasma igniter for an inductively coupled plasma ion source | Sean Kellogg, Tom Miller, Dustin Laur, Shouyin Zhang, Antonius Bastianus Wilhelmus Dirriwachter | 2012-02-28 |