Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125728 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu +1 more | 2024-10-22 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-07-02 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-02-27 |
| D904640 | Substrate carrier | Fred Eric Ruhland, Sumit Subhash Patankar, Vijay D. Parkhe, Daniel Lee Diehl, Mingwei Zhu +1 more | 2020-12-08 |
| 9928997 | Apparatus for PVD dielectric deposition | Keith A. Miller, Thanh X. Nguyen, Ilya Lavitsky, Prashanth Kothnur | 2018-03-27 |
| 6620250 | Method and apparatus for shielding a device from a semiconductor wafer process chamber | Thomas Brezoczky, Gene Y. Kohara | 2003-09-16 |