Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9087679 | Uniformity tuning capable ESC grounding kit for RF PVD chamber | Muhammad M. Rasheed, Rongjun Wang, Thanh X. Nguyen | 2015-07-21 |
| 9028659 | Magnetron design for extended target life in radio frequency (RF) plasmas | Zhenbin Ge, Tza-Jing Gung, Vivek Gupta | 2015-05-12 |
| 8865012 | Methods for processing a substrate using a selectively grounded and movable process kit ring | Zhenbin Ge | 2014-10-21 |
| 8846451 | Methods for depositing metal in high aspect ratio features | Karl M. Brown, John Pipitone | 2014-09-30 |
| 8795487 | Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF power | Keith A. Miller | 2014-08-05 |
| 8795488 | Apparatus for physical vapor deposition having centrally fed RF energy | Muhammad M. Rasheed, Lara Hawrylchak, Michael S. Cox, Donny Young, Kirankumar Neelasandra SAVANDAIAH | 2014-08-05 |
| 8790499 | Process kit components for titanium sputtering chamber | Donny Young, Ilyoung (Richard) Hong, Kathleen Scheible | 2014-07-29 |
| 8702918 | Apparatus for enabling concentricity of plasma dark space | Donny Young, Keith A. Miller, Muhammad M. Rasheed, Steve Sansoni, Uday Pai | 2014-04-22 |
| 8647484 | Target for sputtering chamber | Donny Young, Ilyoung (Richard) Hong, Kathleen Scheible, Umesh M. Kelkar | 2014-02-11 |
| 8563428 | Methods for depositing metal in high aspect ratio features | Karl M. Brown, John Pipitone, Ying Rui, Daniel J. Hoffman | 2013-10-22 |
| 8535443 | Gas line weldment design and process for CVD aluminum | Wei Ti Lee, Ted Guo, Steve H. Chiao | 2013-09-17 |
| 7857947 | Unique passivation technique for a CVD blocker plate to prevent particle formation | Wei Ti Lee, Ted Guo | 2010-12-28 |
| 7824743 | Deposition processes for titanium nitride barrier and aluminum | Wei Ti Lee, Yen-Chih Wang, Mohd Fadzli Anwar Hassan, Ryeun Kwan Kim, Hyung Chul Park +1 more | 2010-11-02 |
| 7422664 | Method for plasma ignition | Adolph Miller Allen | 2008-09-09 |
| 7389645 | Radiation shield for cryogenic pump for high temperature physical vapor deposition | — | 2008-06-24 |