Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heater cover plate for uniformity improvement

Heater cover plate for uniformity improvement

US Patent 11562914 · Granted Jan 24, 2023

Estimated economic value: $45,726,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Heater cover plate for uniformity improvement2025
Heater cover plate for uniformity improvement2025
Process kit for a substrate support2025
ALD cycle time reduction using process chamber lid with tunable pumping2024
Multi-zone showerhead2024
Lids and lid assembly kits for atomic layer deposition chambers2024
Methods and apparatus for reducing sputtering of a grounded shield in a process 2024
Part, sensor, and metrology data integration2023
ALD cycle time reduction using process chamber lid with tunable pumping2023
High temperature vacuum seal2023
High temperature chemical vapor deposition lid2023
Pumping liner for improved flow uniformity2023