Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pumping liner for improved flow uniformity

Pumping liner for improved flow uniformity

US Patent 11415147 · Granted Aug 16, 2022

Estimated economic value: $38,686,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

High conductance variable orifice valve2025
Gas mixer2025
Heater cover plate for uniformity improvement2025
Apparatus and methods for fine planar non-uniformity improvement2025
Thermal shield for processing chamber2025
Process kit for a substrate support2025
Process kit for a substrate support2025
Self-adjustable variable orifice check valve for back pressure reduction2025
Centering wafer for processing chamber2025
ALD cycle time reduction using process chamber lid with tunable pumping2024
ALD cycle time reduction using process chamber lid with tunable pumping2024
ALD cycle time reduction using process chamber lid with tunable pumping2024