| 9396933 |
PVD buffer layers for LED fabrication |
Mingwei Zhu, Rongjun Wang, Nag B. Patibandia, Xianmin Tang, Vivek Agrawal +5 more |
2016-07-19 |
$14,320,000 |
| 9343274 |
Process kit shield for plasma enhanced processing chamber |
Donny Young, Kirankumar Neelasandra SAVANDAIAH, Uday Pai |
2016-05-17 |
$7,135,000 |
| 9303311 |
Substrate processing system with mechanically floating target assembly |
Donny Young, Alan A. Ritchie, Uday Pai, Keith A. Miller |
2016-04-05 |
$9,374,000 |
| 9281167 |
Variable radius dual magnetron |
Thanh X. Nguyen, Rongjun Wang, Xianmin Tang |
2016-03-08 |
$13,282,000 |
| 9255322 |
Substrate processing system having symmetric RF distribution and return paths |
Donny Young, Alan A. Ritchie, Keith A. Miller |
2016-02-09 |
$18,126,000 |
| 9222172 |
Surface treated aluminum nitride baffle |
Dmitry Lubomirsky |
2015-12-29 |
$15,334,000 |
| 9202736 |
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing |
Kadthala Ramaya Narendrnath, Dmitry Lubomirsky, Xinglong Chen, Sudhir Gondhalekar, Tony Kaushal |
2015-12-01 |
$8,913,000 |
| 9177763 |
Method and apparatus for measuring pressure in a physical vapor deposition chamber |
Alan A. Ritchie, Isaac Porras, Keith A. Miller |
2015-11-03 |
$6,969,000 |
| 9087679 |
Uniformity tuning capable ESC grounding kit for RF PVD chamber |
Rongjun Wang, Thanh X. Nguyen, Alan A. Ritchie |
2015-07-21 |
$59,417,000 |
| 8968537 |
PVD sputtering target with a protected backing plate |
Rongjun Wang |
2015-03-03 |
$11,301,000 |
| 8911601 |
Deposition ring and electrostatic chuck for physical vapor deposition chamber |
Keith A. Miller, Rongjun Wang |
2014-12-16 |
$14,131,000 |
| 8895450 |
Low resistivity tungsten PVD with enhanced ionization and RF power coupling |
Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more |
2014-11-25 |
$12,494,000 |
| 8795488 |
Apparatus for physical vapor deposition having centrally fed RF energy |
Lara Hawrylchak, Michael S. Cox, Donny Young, Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie |
2014-08-05 |
$16,131,000 |
| 8702918 |
Apparatus for enabling concentricity of plasma dark space |
Alan A. Ritchie, Donny Young, Keith A. Miller, Steve Sansoni, Uday Pai |
2014-04-22 |
$38,526,000 |
| 8647485 |
Process kit shield for plasma enhanced processing chamber |
Donny Young, Kirankumar Neelasandra SAVANDAIAH, Uday Pai |
2014-02-11 |
$13,314,000 |
| 8580094 |
Magnetron design for RF/DC physical vapor deposition |
Rongjun Wang, Sally S. Lou, Jianxin Lei, Xianmin Tang, Srinivas Gandikota +4 more |
2013-11-12 |
$7,355,000 |
| 8558299 |
Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming |
Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more |
2013-10-15 |
$14,573,000 |
| 8409355 |
Low profile process kit |
Teruki Iwashita, Hiroshi Otake, Yuki Koga, Kazutoshi Maehara, Xinglong Chen +2 more |
2013-04-02 |
$12,624,000 |
| 8252410 |
Ceramic cover wafers of aluminum nitride or beryllium oxide |
— |
2012-08-28 |
$5,542,000 |
| 8108981 |
Method of making an electrostatic chuck with reduced plasma penetration and arcing |
Dmitry Lubomirsky, Kadthala Ramaya Narendranath, Xinglong Chen, Sudhir Gondhalekar, Tony Kaushal |
2012-02-07 |
$11,451,000 |
| 8022377 |
Method and apparatus for excimer curing |
Dmitry Lubomirsky, Ellie Yieh |
2011-09-20 |
$5,642,000 |
| 7964040 |
Multi-port pumping system for substrate processing chambers |
Dmitry Lubomirsky, James Santosa |
2011-06-21 |
$5,178,000 |
| 7848076 |
Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing |
Kadthala Ramaya Narendranath, Dmitry Lubomirsky, Xinglong Chen, Sudhir Goodhalekar, Tony Kaushal |
2010-12-07 |
$3,240,000 |
| 7811411 |
Thermal management of inductively coupled plasma reactors |
Siqing Lu, Qiwei Liang, Irene Chou, Steven H. Kim, Young S. Lee +1 more |
2010-10-12 |
$9,610,000 |
| 7789993 |
Internal balanced coil for inductively coupled high density plasma processing chamber |
Robert Chen, Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua +4 more |
2010-09-07 |
$5,434,000 |
