Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8108981 | Method of making an electrostatic chuck with reduced plasma penetration and arcing | Dmitry Lubomirsky, Xinglong Chen, Sudhir Gondhalekar, Muhammad M. Rasheed, Tony Kaushal | 2012-02-07 |
| 7848076 | Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing | Dmitry Lubomirsky, Xinglong Chen, Sudhir Goodhalekar, Muhammad M. Rasheed, Tony Kaushal | 2010-12-07 |