Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7848076 | Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing | Kadthala Ramaya Narendranath, Dmitry Lubomirsky, Xinglong Chen, Muhammad M. Rasheed, Tony Kaushal | 2010-12-07 |