Issued Patents All Time
Showing 76–81 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7722737 | Gas distribution system for improved transient phase deposition | Sudhir Gondhalekar, Robert Duncan, Siamak Salimian, Harry Whitesell, Bruno Geoffrion +2 more | 2010-05-25 |
| 7572647 | Internal balanced coil for inductively coupled high density plasma processing chamber | Robert Chen, Canfeng Lai, Xinglong Chen, Weiyi Luo, Zhong Qiang Hua +4 more | 2009-08-11 |
| 7498268 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Hemant P. Mungekar, Thanh Pham +1 more | 2009-03-03 |
| 7183227 | Use of enhanced turbomolecular pump for gapfill deposition using high flows of low-mass fluent gas | Steven H. Kim | 2007-02-27 |
| 7141138 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Hemant P. Mungekar, Thanh Pham +1 more | 2006-11-28 |
| 6764265 | Erosion resistant slit valve | Charles S. Kunze, Andrew V. LE | 2004-07-20 |