| D936187 |
Gas distribution assembly lid |
Muhannad Mustafa |
2021-11-16 |
|
| 11011676 |
PVD buffer layers for LED fabrication |
Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Xianmin Tang, Vivek Agrawal +5 more |
2021-05-18 |
$51,490,000 |
| 10763090 |
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process |
Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Rongjun Wang, Xianmin Tang +8 more |
2020-09-01 |
$30,946,000 |
| 10718049 |
Process kit shield for improved particle reduction |
Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang |
2020-07-21 |
$62,479,000 |
| 10704142 |
Quick disconnect resistance temperature detector assembly for rotating pedestal |
Muhannad Mustafa, Mario D. Sanchez, Yu Chang, William Kuang, Vinod Konda Purathe +1 more |
2020-07-07 |
$29,619,000 |
| 10704147 |
Process kit design for in-chamber heater and wafer rotating mechanism |
Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Cheng-Hsiung Tsai, Vikash Banthia |
2020-07-07 |
$29,619,000 |
| 10692706 |
Methods and apparatus for reducing sputtering of a grounded shield in a process chamber |
Alan A. Ritchie, John C. Forster |
2020-06-23 |
$29,749,000 |
| 10571069 |
Gimbal assembly for heater pedestal |
Muhannad Mustafa |
2020-02-25 |
$22,337,000 |
| 10519546 |
Apparatus and method for providing a uniform flow of gas |
Ravi Jallepally, Ilker Durukan |
2019-12-31 |
$41,069,000 |
| 10407771 |
Atomic layer deposition chamber with thermal lid |
Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Wei V. Tang +6 more |
2019-09-10 |
$15,043,000 |
| 10214815 |
Surface treated aluminum nitride baffle |
Dmitry Lubomirsky |
2019-02-26 |
$27,960,000 |
| 10199204 |
Target retaining apparatus |
Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen +1 more |
2019-02-05 |
$20,569,000 |
| 10167553 |
Apparatus and method for providing a uniform flow of gas |
Ravi Jallepally, Ilker Durukan |
2019-01-01 |
|
| 10096455 |
Extended dark space shield |
Thanh X. Nguyen, Rongjun Wang, Xianmin Tang |
2018-10-09 |
$16,738,000 |
| 10060024 |
Sputtering target for PVD chamber |
Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung |
2018-08-28 |
$23,630,000 |
| 9960021 |
Physical vapor deposition (PVD) target having low friction pads |
Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Thanh X. Nguyen +1 more |
2018-05-01 |
$18,276,000 |
| 9957601 |
Apparatus for gas injection in a physical vapor deposition chamber |
Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie, Isaac Porras, Keith A. Miller |
2018-05-01 |
$18,276,000 |
| 9914999 |
Oxidized showerhead and process kit parts and methods of using same |
Balasubramanian Ramachandran, Shih Chung Chen, Kevin A. PAPKE, Lei Zhou, Jing Zhou |
2018-03-13 |
$33,804,000 |
| 9914632 |
Methods and apparatus for liquid chemical delivery |
Ilker Durukan, Paul F. Ma |
2018-03-13 |
$33,804,000 |
| 9834840 |
Process kit shield for improved particle reduction |
Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang |
2017-12-05 |
$41,374,000 |
| 9752228 |
Sputtering target for PVD chamber |
Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung |
2017-09-05 |
$19,227,000 |
| 9689070 |
Deposition ring and electrostatic chuck for physical vapor deposition chamber |
Keith A. Miller, Rongjun Wang |
2017-06-27 |
$23,322,000 |
| 9633824 |
Target for PVD sputtering system |
Thanh X. Nguyen, Yong Cao, Xianmin Tang |
2017-04-25 |
$22,808,000 |
| 9534286 |
PVD target for self-centering process shield |
Goichi Yoshidome, Ryan Edwin Hanson, Donny Young, Keith A. Miller |
2017-01-03 |
$13,194,000 |
| 9472443 |
Selectively groundable cover ring for substrate process chambers |
Kirankumar Neelasandra SAVANDAIAH, William Johanson, Zhenbin Ge, Goichi Yoshidome |
2016-10-18 |
$11,711,000 |
