Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D936187 | Gas distribution assembly lid | Muhannad Mustafa | 2021-11-16 |
| 11011676 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Xianmin Tang, Vivek Agrawal +5 more | 2021-05-18 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10718049 | Process kit shield for improved particle reduction | Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2020-07-21 |
| 10704142 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Muhannad Mustafa, Mario D. Sanchez, Yu Chang, William Kuang, Vinod Konda Purathe +1 more | 2020-07-07 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Cheng-Hsiung Tsai, Vikash Banthia | 2020-07-07 |
| 10692706 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | Alan A. Ritchie, John C. Forster | 2020-06-23 |
| 10571069 | Gimbal assembly for heater pedestal | Muhannad Mustafa | 2020-02-25 |
| 10519546 | Apparatus and method for providing a uniform flow of gas | Ravi Jallepally, Ilker Durukan | 2019-12-31 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Wei V. Tang +6 more | 2019-09-10 |
| 10214815 | Surface treated aluminum nitride baffle | Dmitry Lubomirsky | 2019-02-26 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen +1 more | 2019-02-05 |
| 10167553 | Apparatus and method for providing a uniform flow of gas | Ravi Jallepally, Ilker Durukan | 2019-01-01 |
| 10096455 | Extended dark space shield | Thanh X. Nguyen, Rongjun Wang, Xianmin Tang | 2018-10-09 |
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung | 2018-08-28 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9957601 | Apparatus for gas injection in a physical vapor deposition chamber | Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie, Isaac Porras, Keith A. Miller | 2018-05-01 |
| 9914632 | Methods and apparatus for liquid chemical delivery | Ilker Durukan, Paul F. Ma | 2018-03-13 |
| 9914999 | Oxidized showerhead and process kit parts and methods of using same | Balasubramanian Ramachandran, Shih Chung Chen, Kevin A. PAPKE, Lei Zhou, Jing Zhou | 2018-03-13 |
| 9834840 | Process kit shield for improved particle reduction | Rongjun Wang, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2017-12-05 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung | 2017-09-05 |
| 9689070 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Keith A. Miller, Rongjun Wang | 2017-06-27 |
| 9633824 | Target for PVD sputtering system | Thanh X. Nguyen, Yong Cao, Xianmin Tang | 2017-04-25 |
| 9534286 | PVD target for self-centering process shield | Goichi Yoshidome, Ryan Edwin Hanson, Donny Young, Keith A. Miller | 2017-01-03 |
| 9472443 | Selectively groundable cover ring for substrate process chambers | Kirankumar Neelasandra SAVANDAIAH, William Johanson, Zhenbin Ge, Goichi Yoshidome | 2016-10-18 |