Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163630 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2018-12-25 |
| 10163656 | Methods for dry etching cobalt metal using fluorine radicals | Bhushan Zope | 2018-12-25 |
| 10043709 | Methods for thermally forming a selective cobalt layer | Hua Ai, Jiang Lu, Paul F. Ma, Sang Ho Yu, Feng Q. Liu +2 more | 2018-08-07 |
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Ping Han Hsieh, Teng-Fang Kuo, Shi Wei Toh | 2018-06-26 |
| 9966275 | Methods of treating nitride films | Brent Biggs, Takashi Kuratomi, Mark Lee | 2018-05-08 |
| 9842769 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-12-12 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9735009 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2017-08-15 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-06-20 |
| 9637819 | Methods for preferential growth of cobalt within substrate features | Bhushan Zope | 2017-05-02 |
| 9601339 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2017-03-21 |
| 9546419 | Method of reducing tungsten film roughness and resistivity | Amit Khandelwal | 2017-01-17 |
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2016-05-03 |
| 9275865 | Plasma treatment of film for impurity removal | Benjamin C. Wang, Joshua Collins, Michael S. Jackson, Amit Khandelwal | 2016-03-01 |
| 9230835 | Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices | Srinivas Gandikota, Seshadri Ganguli, Xinyu Fu, Bo Zheng, Yu Lei | 2016-01-05 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2016-01-05 |
| 9218980 | Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate | Bhushan Zope | 2015-12-22 |
| 8927423 | Methods for annealing a contact metal layer to form a metal silicidation layer | Xinyu Fu, Wei V. Tang, Kavita Shah, Srinivas Gandikota, San Yu | 2015-01-06 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Benjamin C. Wang, Kai Wu +3 more | 2014-12-30 |
| 8835311 | High temperature tungsten metallization process | Joshua Collins, Murali Narasimhan, Jingjing Liu, Sang-Hyeob Lee, Kai Wu | 2014-09-16 |
| 8821637 | Temperature controlled lid assembly for tungsten nitride deposition | Sang-Hyeob Lee, Xiaoxiong Yuan, Salvador P. Umotoy, Yu Chang, Gwo-Chuan Tzu +4 more | 2014-09-02 |
| 8617985 | High temperature tungsten metallization process | Joshua Collins, Murali Narasimhan, Jingjing Liu, Sang-Hyeob Lee, Kai Wu | 2013-12-31 |
| 8513116 | Atomic layer deposition of tungsten materials | Amit Khandelwal, Madhu Moorthy, Kai Wu | 2013-08-20 |
| 8211799 | Atomic layer deposition of tungsten materials | Amit Khandelwal, Madhu Moorthy, Kai Wu | 2012-07-03 |