Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8642473 | Methods for contact clean | Mei Chang, Bo Zheng, Arvind Sundarrajan, John C. Forster, Umesh M. Kellkar +1 more | 2014-02-04 |
| 8551880 | Ammonia-based plasma treatment for metal fill in narrow features | Bencherki Mebarki, Amit Khandelwal | 2013-10-08 |
| 6656840 | Method for forming silicon containing layers on a substrate | Nagarajan Rajagopalan, Joe Feng, Christopher S. Ngai, Meiyee Shek, Suketu Arun Parikh | 2003-12-02 |