| 12196617 |
Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber |
Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more |
2025-01-14 |
| 12165934 |
Substrate processing monitoring |
Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more |
2024-12-10 |
| 8062422 |
Method and apparatus for generating a precursor for a semiconductor processing system |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2011-11-22 |
| 7597758 |
Chemical precursor ampoule for vapor deposition processes |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2009-10-06 |
| 7588736 |
Apparatus and method for generating a chemical precursor |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2009-09-15 |
| 7524374 |
Method and apparatus for generating a precursor for a semiconductor processing system |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2009-04-28 |
| 7270709 |
Method and apparatus of generating PDMAT precursor |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2007-09-18 |
| 7026238 |
Reliability barrier integration for Cu application |
Ming Xi, Paul Smith, Ling Chen, Michael Yang, Mei Chang +2 more |
2006-04-11 |
| 6905541 |
Method and apparatus of generating PDMAT precursor |
Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more |
2005-06-14 |
