Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2011-11-22 |
| 7597758 | Chemical precursor ampoule for vapor deposition processes | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2009-10-06 |
| 7588736 | Apparatus and method for generating a chemical precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2009-09-15 |
| 7524374 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2009-04-28 |
| 7270709 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2007-09-18 |
| 7026238 | Reliability barrier integration for Cu application | Ming Xi, Paul Smith, Ling Chen, Michael Yang, Mei Chang +2 more | 2006-04-11 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2005-06-14 |