Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6527865 | Temperature controlled gas feedthrough | Talex Sajoto, Charles Dornfest, Leonid Selyutin, Jun Zhao, Vincent Ku | 2003-03-04 |
| 6189482 | High temperature, high flow rate chemical vapor deposition apparatus and related methods | Jun Zhao, Lee Luo, Jia-Xiang Wang, Talex Sajoto, Stefan Wolff +2 more | 2001-02-20 |
| 6051286 | High temperature, high deposition rate process and apparatus for depositing titanium layers | Jun Zhao, Lee Luo, Jia-Xiang Wang, Stefan Wolff, Talex Sajoto | 2000-04-18 |
| 5993916 | Method for substrate processing with improved throughput and yield | Jun Zhao, Lee Luo | 1999-11-30 |
| 5983906 | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment | Jun Zhao, Lee Luo, Jia-Xiang Wang, Stefan Wolff, Talex Sajoto +2 more | 1999-11-16 |