Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8796843 | RF and milimeter-wave high-power semiconductor device | Dubravko Babic, Quentin Diduck | 2014-08-05 |
| 6444040 | Gas distribution plate | Harald Herchen, David Palagashvili, Dmitry Lubomirsky | 2002-09-03 |
| 6270859 | Plasma treatment of titanium nitride formed by chemical vapor deposition | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2001-08-07 |
| 6129044 | Apparatus for substrate processing with improved throughput and yield | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2000-10-10 |
| 5964947 | Removable pumping channel liners within a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1999-10-12 |
| 5885356 | Method of reducing residue accumulation in CVD chamber using ceramic lining | Jun Zhao, Tom K. Cho, Xin Sheng Guo, Atsushi Tabata, Jianmin Qiao | 1999-03-23 |
| 5882411 | Faceplate thermal choke in a CVD plasma reactor | Jun Zhao | 1999-03-16 |
| 5853607 | CVD processing chamber | Jun Zhao, Tom K. Cho, Charles Dornfest, Stefan Wolff, Kevin Fairbairn +2 more | 1998-12-29 |
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1998-12-08 |
| 5558717 | CVD Processing chamber | Jun Zhao, Tom K. Cho, Charles Dornfest, Stefan Wolff, Kevin Fairbairn +2 more | 1996-09-24 |