{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Methods and devices to reduce defects in dielectric stack structures", "item": "https://www.patentleaderboard.com/patent/7608300"}]}

Home › Methods and devices to reduce defects in dielectric stack structures

Methods and devices to reduce defects in dielectric stack structures

US Patent 7608300 · Granted Oct 27, 2009

Estimated economic value: $53,033,000 ⓘ

Assignee

Applied Materials

Inventors

Christopher Dennis Bencher (105 patents)
Lee Luo (32 patents)

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