Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1998-12-08 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1998-12-08 |