Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218997 | Electrostatic chuck having reduced arcing | Bum Jin Park, Sun-il Kim, Hyong Seok Oh, Sung-Chul Cho, Young Sam Na +5 more | 2015-12-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218997 | Electrostatic chuck having reduced arcing | Bum Jin Park, Sun-il Kim, Hyong Seok Oh, Sung-Chul Cho, Young Sam Na +5 more | 2015-12-22 |