Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511390 | Pivotable substrate retaining ring | Steven M. Zuniga, Andrew J. Nagengast | 2022-11-29 |
| 11389925 | Offset head-spindle for chemical mechanical polishing | Steven M. Zuniga, Bum Jick Kim, Danielle Loi | 2022-07-19 |
| 11325223 | Carrier head with segmented substrate chuck | Steven M. Zuniga | 2022-05-10 |
| 10952594 | Segmented instrument having braking capabilities | Carson Shellenberger, Christopher Julian, Joshua T. Oen | 2021-03-23 |
| 10786885 | Thin plastic polishing article for CMP applications | Robert D. Tolles, Gregory E. Menk, Eric Davey, You Wang, Huyen Karen Tran +3 more | 2020-09-29 |
| 10512392 | Segmented instrument having braking capabilities | Carson Jay Shellberger, Christopher Julian, Joshua Oeh | 2019-12-24 |
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Paul D. Butterfield, Jason Garcheung Fung, Shou-Sung Chang, Jimin Zhang +1 more | 2018-09-18 |
| 9987724 | Polishing system with pad carrier and conditioning station | Hung Chih Chen | 2018-06-05 |
| 9751189 | Compliant polishing pad and polishing module | Chih-Hung Chen, Steven M. Zuniga | 2017-09-05 |
| 9662762 | Modifying substrate thickness profiles | Hung Chih Chen | 2017-05-30 |
| 9352441 | Chemical mechanical polisher with hub arms mounted | Steven M. Zuniga, Chih-Hung Chen | 2016-05-31 |
| 9050700 | Methods and apparatus for an improved polishing head retaining ring | Hung Chih Chen, Gautam Shashank Dandavate, Samuel Chu-Chiang Hsu | 2015-06-09 |