Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146736 | Metrology system | Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more | 2024-11-19 |
| 11486689 | Metrology system | Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more | 2022-11-01 |
| 10598521 | Metrology system | Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more | 2020-03-24 |
| 8545660 | Bonding apparatus and method | Steven M. Zuniga, Robert D. Tolles, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2013-10-01 |
| 8360409 | Apparatus and method for simultaneous treatment of multiple workpieces | Steven M. Zuniga, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2013-01-29 |
| 8334191 | Two-chamber system and method for serial bonding and exfoliation of multiple workpieces | Steven M. Zuniga, Andrew J. Nagengast, Kirk Liebscher, John Alexander, Keenan Leon Guerrero | 2012-12-18 |
| 8309374 | Advanced platform for processing crystalline silicon solar cells | Keith Brian Porthouse, Peter G. Borden, Tristan R. Holtam, Lisong Zhou, Ian Latchford +1 more | 2012-11-13 |
| 8207047 | Apparatus and method for simultaneous treatment of multiple workpieces | Steven M. Zuniga, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal | 2012-06-26 |
| 8173473 | Laser system for processing solar wafers in a carrier | Steven M. Zuniga, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang +1 more | 2012-05-08 |
| 8151852 | Bonding apparatus and method | Steven M. Zuniga, Robert D. Tolles, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2012-04-10 |
| 5773841 | Self aligning vacuum seal assembly | — | 1998-06-30 |
| 5637881 | Method to detect non-spherical particles using orthogonally polarized light | Raymond Burghard, Peter G. Borden | 1997-06-10 |
| 5606418 | Quasi bright field particle sensor | Peter G. Borden | 1997-02-25 |
| 5534706 | Particle monitor for throttled pumping systems | Peter G. Borden, Matt A. Evanko | 1996-07-09 |
| 5436465 | Modular particle monitor for vacuum process equipment | Peter G. Borden, Hung H. Quach | 1995-07-25 |
| 5347138 | In situ real time particle monitor for a sputter coater chamber | Peter G. Borden | 1994-09-13 |