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Metrology system |
Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more |
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Metrology system |
Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more |
2022-11-01 |
| 10598521 |
Metrology system |
Mark Baker, Chris Barns, Robert Batten, Shawn Boling, Jared Greco +2 more |
2020-03-24 |
| 8545660 |
Bonding apparatus and method |
Steven M. Zuniga, Robert D. Tolles, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero |
2013-10-01 |
| 8360409 |
Apparatus and method for simultaneous treatment of multiple workpieces |
Steven M. Zuniga, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal |
2013-01-29 |
| 8334191 |
Two-chamber system and method for serial bonding and exfoliation of multiple workpieces |
Steven M. Zuniga, Andrew J. Nagengast, Kirk Liebscher, John Alexander, Keenan Leon Guerrero |
2012-12-18 |
| 8309374 |
Advanced platform for processing crystalline silicon solar cells |
Keith Brian Porthouse, Peter G. Borden, Tristan R. Holtam, Lisong Zhou, Ian Latchford +1 more |
2012-11-13 |
| 8207047 |
Apparatus and method for simultaneous treatment of multiple workpieces |
Steven M. Zuniga, Andrew J. Nagengast, Keenan Leon Guerrero, Harish K. Bolla, Aditya Agarwal |
2012-06-26 |
| 8173473 |
Laser system for processing solar wafers in a carrier |
Steven M. Zuniga, Venkateswaran Subbaraman, Kirk Liebscher, John Alexander, Zhenhua Zhang +1 more |
2012-05-08 |
| 8151852 |
Bonding apparatus and method |
Steven M. Zuniga, Robert D. Tolles, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero |
2012-04-10 |
| 5773841 |
Self aligning vacuum seal assembly |
— |
1998-06-30 |
| 5637881 |
Method to detect non-spherical particles using orthogonally polarized light |
Raymond Burghard, Peter G. Borden |
1997-06-10 |
| 5606418 |
Quasi bright field particle sensor |
Peter G. Borden |
1997-02-25 |
| 5534706 |
Particle monitor for throttled pumping systems |
Peter G. Borden, Matt A. Evanko |
1996-07-09 |
| 5436465 |
Modular particle monitor for vacuum process equipment |
Peter G. Borden, Hung H. Quach |
1995-07-25 |
| 5347138 |
In situ real time particle monitor for a sputter coater chamber |
Peter G. Borden |
1994-09-13 |
