Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6575825 | CMP polishing pad | Steven T. Mear, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2003-06-10 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Steven M. Zuniga, Charles C. Garretson | 2003-06-03 |
| 6533645 | Substrate polishing article | — | 2003-03-18 |
| 6527624 | Carrier head for providing a polishing slurry | Sidney P. Huey | 2003-03-04 |
| 6524164 | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus | — | 2003-02-25 |
| 6454630 | Rotatable platen having a transparent window for a chemical mechanical polishing apparatus and method of making the same | — | 2002-09-24 |
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Tsungan Cheng, John Prince | 2002-09-03 |
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, James Nystrom, Doyle E. Bennett, Madhavi R. Chandrachood | 2002-04-16 |
| 6348124 | Delivery of polishing agents in a wafer processing system | Matthew G. Garbett, John Hearne, Manoocher Birang | 2002-02-19 |
| 6299516 | Substrate polishing article | — | 2001-10-09 |
| 6290589 | Polishing pad with a partial adhesive coating | — | 2001-09-18 |
| 6280297 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | William L. Guthrie, Jeffrey Marks, Tsungnan Cheng | 2001-08-28 |
| 6220942 | CMP platen with patterned surface | Steven T. Mear, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2001-04-24 |
| 6217426 | CMP polishing pad | Steven T. Mear, Gopalakrishna B. Prabhu, Steven M. Zuniga, Hung Chih Chen | 2001-04-17 |
| 6135868 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, James Nystrom, Doyle E. Bennett, Madhavi R. Chandrachood | 2000-10-24 |
| 6126517 | System for chemical mechanical polishing having multiple polishing stations | Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2000-10-03 |
| 6080046 | Underwater wafer storage and wafer picking for chemical mechanical polishing | Norm Shendon, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Sasson Somekh | 2000-06-27 |
| 6051499 | Apparatus and method for distribution of slurry in a chemical mechanical polishing system | William L. Guthrie, Jeffrey Marks, Tsungnan Cheng, Semyon Spektor, Ivan A. Ocanada +1 more | 2000-04-18 |
| 6036587 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Tsungan Cheng, John Prince | 2000-03-14 |
| 5899801 | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | James Nystrom, Jeffrey Marks, William R. Bartlett, Victor Belitsky | 1999-05-04 |
| 5804507 | Radially oscillating carousel processing system for chemical mechanical polishing | Ilya Perlov, Eugene Gantvarg, Harry Q. Lee, Sasson Somekh | 1998-09-08 |
| 5738574 | Continuous processing system for chemical mechanical polishing | Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 1998-04-14 |
| 5599423 | Apparatus and method for simulating and optimizing a chemical mechanical polishing system | Norman W. Parker, Harry Q. Lee | 1997-02-04 |
| 5186597 | Apparatus for servicing of semiconductor manufacturing equipment | J. Charles Bulsterbaum, Donald A. Costello | 1993-02-16 |