Issued Patents All Time
Showing 51–75 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7438788 | Apparatus and methods for electrochemical processing of microelectronic workpieces | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2008-10-21 |
| 7357850 | Electroplating apparatus with segmented anode array | Daniel J. Woodruff | 2008-04-15 |
| 7351314 | Chambers, systems, and methods for electrochemically processing microfeature workpieces | John L. Klocke | 2008-04-01 |
| 7351315 | Chambers, systems, and methods for electrochemically processing microfeature workpieces | John L. Klocke | 2008-04-01 |
| 7294244 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Thomas H. Oberlitner | 2007-11-13 |
| 7267749 | Workpiece processor having processing chamber with improved processing fluid flow | Gregory J. Wilson, Paul R. McHugh | 2007-09-11 |
| 7264698 | Apparatus and methods for electrochemical processing of microelectronic workpieces | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2007-09-04 |
| 7252714 | Apparatus and method for thermally controlled processing of microelectronic workpieces | Robert W. Batz, Jr., Rajesh Baskaran, Nolan L. Zimmerman, Zhongmin Hu, Gregory J. Wilson +1 more | 2007-08-07 |
| 7247223 | Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces | Paul R. McHugh, Gregory J. Wilson | 2007-07-24 |
| 7217325 | System for processing a workpiece | — | 2007-05-15 |
| 7169280 | Apparatus and method for deposition of an electrophoretic emulsion | John L. Klocke | 2007-01-30 |
| 7150816 | Apparatus and method for deposition of an electrophoretic emulsion | John L. Klocke | 2006-12-19 |
| 7147760 | Electroplating apparatus with segmented anode array | Daniel J. Woodruff | 2006-12-12 |
| 7147765 | Apparatus and method for deposition of an electrophoretic emulsion | John L. Klocke | 2006-12-12 |
| 7118658 | Electroplating reactor | Daniel J. Woodruff | 2006-10-10 |
| 7114903 | Apparatuses and method for transferring and/or pre-processing microelectronic workpieces | Randy Harris | 2006-10-03 |
| 7090751 | Apparatus and methods for electrochemical processing of microelectronic workpieces | — | 2006-08-15 |
| 7002698 | Semiconductor processing apparatus having lift and tilt mechanism | Mark Dix, Vlad Zila, Daniel J. Woodruff | 2006-02-21 |
| 6969682 | Single workpiece processing system | Paul Z. Wirth, Steven L. Peace, Jon Kuntz, Scott Bruner | 2005-11-29 |
| 6930046 | Single workpiece processing system | Eric Lund, Coby Scott GROVE, Steven L. Peace, Paul Z. Wirth, Scott Bruner +1 more | 2005-08-16 |
| 6921468 | Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations | Lyndon Graham, Thomas Ritzdorf, Jeffrey I. Turner | 2005-07-26 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Steve Eudy, Thomas Ritzdorf, Gregory J. Wilson, Daniel J. Woodruff, Randy Harris +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Daniel J. Woodruff, Steve Eudy, Curtis Weber, Randy Harris | 2005-07-12 |
| 6890415 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2005-05-10 |
| 6881309 | Diffuser with spiral opening pattern for electroplating reactor vessel | Robert A. Weaver, Jerry Simchuk, Raymon F. Thompson | 2005-04-19 |