Issued Patents All Time
Showing 76–100 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878955 | Method and apparatus for accessing microelectronic workpiece containers | Randy Harris, Daniel P. Bexten | 2005-04-12 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2005-03-22 |
| 6854473 | Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing station | Reed A. Blackburn | 2005-02-15 |
| 6849167 | Electroplating reactor including back-side electrical contact apparatus | Daniel J. Woodruff, Robert W. Batz, Jr., James T. Kuechmann | 2005-02-01 |
| 6761806 | Processing apparatus with sensory subsystem for detecting the presence/absence of wafers or other workpieces | — | 2004-07-13 |
| 6717171 | Method and apparatus for accessing microelectronic workpiece containers | Randy Harris, Daniel P. Bexten | 2004-04-06 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2004-03-02 |
| 6672820 | Semiconductor processing apparatus having linear conveyer system | Mark Dix, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle | 2004-01-06 |
| 6663762 | Plating system workpiece support having workpiece engaging electrode | Martin Bleck, Lyndon Graham | 2003-12-16 |
| 6660137 | System for electrochemically processing a workpiece | Gregory J. Wilson, Paul R. McHugh | 2003-12-09 |
| 6654122 | Semiconductor processing apparatus having lift and tilt mechanism | Mark Dix, Vladimir Zila, Daniel J. Woodruff | 2003-11-25 |
| 6645355 | Semiconductor processing apparatus having lift and tilt mechanism | Mark Dix, Vlad Zila, Daniel J. Woodruff | 2003-11-11 |
| 6645356 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2003-11-11 |
| 6569297 | Workpiece processor having processing chamber with improved processing fluid flow | Gregory J. Wilson, Paul R. McHugh | 2003-05-27 |
| 6547937 | Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece | Thomas H. Oberlitner | 2003-04-15 |
| 6527926 | Electroplating reactor including back-side electrical contact apparatus | Daniel J. Woodruff, Robert W. Batz, Jr., James T. Kuechmann | 2003-03-04 |
| 6497801 | Electroplating apparatus with segmented anode array | Daniel J. Woodruff | 2002-12-24 |
| 6471460 | Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly | John M. Pedersen | 2002-10-29 |
| 6428662 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2002-08-06 |
| 6428660 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2002-08-06 |
| 6409892 | Reactor vessel having improved cup, anode, and conductor assembly | Daniel J. Woodruff | 2002-06-25 |
| 6368475 | Apparatus for electrochemically processing a microelectronic workpiece | Scott Grace, Matt Johnson, Ken Gibbons | 2002-04-09 |
| 6358388 | Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover | Martin Bleck, Lyndon Graham | 2002-03-19 |
| 6322678 | Electroplating reactor including back-side electrical contact apparatus | Daniel J. Woodruff | 2001-11-27 |
| 6309520 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2001-10-30 |