{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Apparatus for post exposure bake", "item": "https://www.patentleaderboard.com/patent/9958782"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for post exposure bake

Apparatus for post exposure bake

US Patent 9958782 · Granted May 1, 2018

Estimated economic value: $18,276,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electroplating wetting chamber with reduced bubble entrapment2025
PBN heaters for ALD temperature uniformity2025
Electroplating co-planarity improvement by die shielding2025
Vertically adjustable plasma source2025
Parameter adjustment model for semiconductor processing chambers2024
Mechanically-driven oscillating flow agitation2024
Methods, systems, and apparatus for tape-frame substrate cleaning and drying2024
Selective etch using material modification and RF pulsing2024
Electroplating system2024
Electroplating system2024
Systems and methods for improving within die co-planarity uniformity2024
Method and apparatus for post exposure processing of photoresist wafers2024