Electroplating wetting chamber with reduced bubble entrapment

Assignee

• Applied Materials

Inventors

• Kyle M. Hanson (115 patents)
• Unknown
• Gregory Joseph Wilson (3 patents)
• Paul R. McHugh (80 patents)
• Unknown
• Unknown
• Deepak Saagar Kalaikadal (5 patents)
• Daniel Durado (9 patents)
• Calvin R. Stringer (12 patents)
• Unknown
• Jason Rye (10 patents)
• John L. Klocke (40 patents)

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