Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum pre-wetting apparatus and methods

Vacuum pre-wetting apparatus and methods

US Patent 9714462 · Granted Jul 25, 2017

Estimated economic value: $35,016,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma source with floating electrodes2025
Hybrid composite projectile barrel2024
Modular microwave source with multiple metal housings2024
Method and apparatus for post exposure processing of photoresist wafers2024
Plasma source with ceramic electrode plate2023
Post exposure processing apparatus2022
Method and apparatus for post exposure processing of photoresist wafers2021
Post exposure processing apparatus2020
Microelectronic substrate electro processing system2020
Method and apparatus for post exposure processing of photoresist wafers2019
Post exposure processing apparatus2019
Method and apparatus for post exposure processing of photoresist wafers2019